UN3394/3399 KSC1.98L Cylinder for TEOS,TEB.MO (Metal Organic) Source Trimethylgallium Trimethylaluminum (TMA) High-purity Gases (ESGs)

UN3394/3399  KSC900ML / KSC1.98L Cylinder for  TEOS,TEB.MO (Metal Organic) Source Trimethylgallium Trimethylaluminum (TMA) High-purity Gases (ESGs)

 Semiconductor High-purity Electronic Specialty Gases (ESGs)

Medium：TEOS,TEB.MO (Metal Organic) Source …

Metal organic sources (MO sources)

Methylaluminoxane (MAO) | CH3AlO , UN 3394

Dichlorosilane (DCS) | Cl2H2Si ,UN 2189

Trichlorosilane (TCS) | Cl3HSi,UN 1295

Trimethylaluminum (TMA)| C3H9Al, UN 3394

Hexachlorodisilane (HCDS )| Cl6Si2, UN 2987

Triethylborane  ( TEB)| C6H15B,UN3399

Tetraethoxysilane (TEOS)|Si(OC2H5)4 / (C2H5O)4Si /C8H20O4Si, UN1292

Certification:  TS、UN,TPED/ADR

Pressure： 1-10MPa

Helium leak detection rate：≤1X10-9pa.m³/s

Polishing grade：EP,Ra0.07-0.25um

We have manufacturing systems including TS, UN, TPED/ADR, DOT and UN. We can provide you with comprehensive cylinder packaging materials

A. Stainless steel welded gas cylinders: Volume 0.1-1000L, pressure 0.1-10Mpa.

B. UN gas cylinders and pressure tanks: Capacity 150-1000L, pressure 0.1-20Mpa.

C. Carbon steel welded gas cylinders: volume 0.1-1000L, pressure 0.1-105Mpa, Marine engineering gas cylinders, adsorption gas cylinders, hydrogen gas cylinders, carbon steel cylinder groups, vacuum gas cylinders.

D. All kinds of small gas cylinders: sampling gas cylinders, MO source gas cylinders, special metal gas cylinders, ultra-high purity gas cylinders, strong corrosion gas cylinders, strong oxidation gas cylinder ultra-high temperature gas cylinders (750°C), ultra-low temperature gas cylinders (-196℃).

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