Trisilylamine TSA KSC63L Cylinder for (SiH3)3N /6N/8N/10N UN 3491 High-purity Electronic Specialty Gases

Trisilylamine TSA KSC63L Cylinder for (SiH3)3N /6N/8N/10N UN 3491 High-purity Electronic Specialty Gases (ESGs)

Medium：Trisilylamine (SiH3)3N/ H9NSi3 / N (SiH₃)₃ /UN 3491 TSA Material Solutions…99.998%

Tungsten Hexafluoride WF6  , UN 2196

Metal organic sources (MO sources)

Methylaluminoxane (MAO) | CH3AlO , UN 3394

Dichlorosilane (DCS) | Cl2H2Si ,UN 2189

Trichlorosilane (TCS) | Cl3HSi,UN 1295

Trimethylaluminum (TMA)| C3H9Al, UN 3394

Hexachlorodisilane (HCDS )| Cl6Si2, UN 2987

Triethylborane  ( TEB)| C6H15B,UN3399

Tetraethoxysilane (TEOS)|Si(OC2H5)4 / (C2H5O)4Si /C8H20O4Si, UN1292

Certification:UN / ASME

Usage temperature：-40~65℃

Pressure： 1.8MPa

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KS Vessel,KUNSHI Vessel Stainless Steel Grade 6N High Purity Ultrapure Industrial Gas Cylinder for SiH2CI2  SiHCI3  CIF3  HF  WF3  BCI3

Ultrapure Industrial Gas Metal Alkyls Tank Cylinder 40L,516L High Purity Gas Cylinder  UN3394 , UN3399 ,UN1741、UN2189、UN2196...