Safety Electronic-grade Gas Cylinder for High-purity Electronic Specialty Gases TEOS, TEB, and STC

Safety Electronic-grade Gas Cylinder for High-purity Electronic Specialty Gases TEOS, TEB, and STC

Electronic-grade High-purity Cylinders 

Comprehensive Information and Safety Specifications for TEOS, TEB, and STC

TEOS (Tetraethyl Orthosilicate), TEB (Triethylborane), and STC (Silicon Tetrachloride) are all important chemical raw materials, widely used in fields such as semiconductors, material synthesis, and organic chemicals. Each of the three has unique physical and chemical properties and hazardous characteristics: TEOS is commonly used for preparing silicon-based thin film materials, TEB is mostly used as an organic synthesis catalyst and semiconductor dopant, and STC is a core intermediate for producing high-purity silicon. To ensure operational safety and compliant management, the following sections detail the core information, hazardous characteristics, safety protection, and storage and transportation specifications of each substance.

I. TEOS (Tetraethyl Orthosilicate)

1. Basic Identification Information

2. Core Physical and Chemical Properties

• State and Appearance: Colorless and transparent liquid under normal temperature and pressure, with a slight ethanol-like odor, highly volatile.

• Key Temperature Parameters: Melting point -77℃, boiling point 168.8℃, flash point 46℃ (closed cup), auto-ignition temperature 370℃.

• Density: Liquid density 0.934 g/cm³ (20℃), relative gas density (air=1) 7.19 (heavier than air, tends to accumulate in low-lying areas).

• Chemical Stability: Stable at room temperature; hydrolyzes slowly in water to form ethanol and silicic acid, with hydrolysis accelerating as temperature rises or acidity/alkalinity increases; may react with strong oxidants and decompose to produce toxic fumes at high temperatures.

• Solubility: Easily soluble in organic solvents such as ethanol, ether, and petroleum ether; slightly soluble in water.

3. Hazardous Characteristics and Safety Protection

• Hazardous Characteristics: Flammable; its vapor can form an explosive mixture with air, with an explosion limit of 1.4%~32% (volume fraction). Easily ignites and explodes when exposed to open flames, high temperatures, or electrostatic sparks. Vapor is irritating to the eyes, nose, and respiratory tract; high-concentration exposure may cause dizziness, nausea, and other discomfort; liquid contact with skin can cause mild irritation.

• Safety Protection Measures:

• Personal Protection: Wear chemical splash goggles, nitrile rubber gloves, and anti-static work clothes during operation; wear a filter-type gas mask (ethanol vapor filter canister) in high-concentration environments.

• Work Environment: Ensure good ventilation, install explosion-proof electrical equipment, and set up a flammable gas detection and alarm device (alarm threshold: 10% of the lower explosive limit); equip on-site with dry powder fire extinguishers and carbon dioxide fire extinguishers; strictly prohibit open flames and high-temperature equipment nearby.

• Emergency Treatment: For skin contact, rinse with flowing water for 15 minutes; for eye contact, rinse with plenty of water for 15 minutes and then seek medical attention; for leakage, absorb with sand or inert adsorbent materials, collect and dispose of as hazardous waste; for fire, extinguish with dry powder or carbon dioxide, and prohibit direct flushing of the leak with water.

4. Storage and Transportation

• Storage: Store in a dedicated cool and well-ventilated warehouse with a temperature not exceeding 30℃; keep away from ignition sources and oxidants, and store separately from acidic substances and water; ensure containers are tightly sealed to prevent volatilization and moisture absorption.

• Transportation: Use explosion-proof transport vehicles equipped with anti-static grounding devices and marked with "Flammable Liquid" warning signs; strictly prohibit mixed transportation with oxidants and acidic substances; avoid exposure to sunlight, rain, and severe vibration during transportation.

II. TEB (Triethylborane)

1. Basic Identification Information

2. Core Physical and Chemical Properties

• State and Appearance: Colorless and transparent liquid under normal temperature and pressure, with a strong pungent odor, highly volatile.

• Key Temperature Parameters: Melting point -92.9℃, boiling point 95℃, flash point -35℃ (closed cup), auto-ignition temperature 15℃ (spontaneously combusts when in contact with air at room temperature).

• Density: Liquid density 0.808 g/cm³ (20℃), relative gas density (air=1) 3.38 (heavier than air, tends to accumulate in low-lying areas).

• Chemical Stability: Extremely chemically reactive; ignites immediately when in contact with air at room temperature, producing a blue flame; reacts with water to form boron hydroxide and ethane, releasing a large amount of heat; reacts violently with oxidants and acidic substances, even exploding; no obvious corrosion to metals, but contact with copper, silver, and other metals should be avoided (may accelerate decomposition).

• Solubility: Easily soluble in organic solvents such as ethanol, ether, benzene, and petroleum ether; insoluble in water.

3. Hazardous Characteristics and Safety Protection

• Hazardous Characteristics: Extremely flammable with an extremely low auto-ignition point; spontaneously combusts when exposed to air at room temperature. Combustion products include irritating fumes such as boron oxides. Vapor is strongly irritating to the eyes, nose, and respiratory tract; high-concentration inhalation can cause difficulty breathing and pulmonary edema. Liquid contact with skin can cause chemical burns, and secondary burns may occur due to spontaneous combustion.

• Safety Protection Measures:

• Personal Protection: Operate in a glove box protected by inert gas (nitrogen/argon) throughout the process; wear a positive pressure air respirator, chemical splash full-face mask, fluororubber gloves, flame-retardant chemical protective clothing, and chemical-resistant boots.

• Work Environment: The operation area should be a closed, explosion-proof space protected by inert gas; install flammable gas detection and alarm devices and flame detection devices; equip on-site with dry powder fire extinguishers and carbon dioxide fire extinguishers; strictly prohibit any ignition sources (including static electricity and high-temperature surfaces); set up an emergency shower and eye washer (within ≤10 meters from the operation point).

• Emergency Treatment: For skin contact, immediately rinse with plenty of flowing water for 15 minutes; if combustion occurs, extinguish with dry powder first and then seek medical attention; for eye contact, rinse with plenty of water for 15 minutes and then seek medical attention; for leakage, immediately purge and dilute with inert gas, cover and absorb with sand or inert adsorbent materials (prohibit flushing with water), collect and dispose of as hazardous waste; for fire, extinguish with dry powder or carbon dioxide; fire extinguishers should operate upwind and wear full protective equipment.

4. Storage and Transportation

• Storage: Store in dedicated high-pressure resistant steel cylinders (316L stainless steel material) in a closed warehouse protected by inert gas; control the temperature between -20℃~20℃; keep away from ignition sources, oxidants, acidic substances, and water; the warehouse should be equipped with an inert gas purging system and leakage emergency treatment devices; regularly check the sealing performance of the steel cylinders.

• Transportation: Use special tank-type transport vehicles that are explosion-proof and protected by inert gas, equipped with anti-static grounding devices and temperature control systems, and marked with dual warning signs of "Spontaneously Combustible Substance" and "Flammable Liquid"; strictly control the temperature during transportation, avoiding exposure to sunlight, rain, and severe vibration; strictly prohibit mixed transportation with oxidants, acidic substances, and water; drivers and escorts must have professional qualifications and be familiar with emergency treatment methods.

III. STC (Silicon Tetrachloride)

1. Basic Identification Information

2. Core Physical and Chemical Properties

• State and Appearance: Colorless and transparent liquid under normal temperature and pressure, with a pungent odor, highly volatile; forms white acid mist when volatilized vapor comes into contact with moisture in the air.

• Key Temperature Parameters: Melting point -70℃, boiling point 57.6℃, no flash point (non-flammable, but hydrolysis products are hazardous).

• Density: Liquid density 1.48 g/cm³ (20℃), relative gas density (air=1) 5.86 (heavier than air, tends to accumulate in low-lying areas).

• Chemical Stability: Stable at room temperature; hydrolyzes violently in water to form hydrochloric acid (HCl) and silicon dioxide (SiO₂), releasing a large amount of heat. Reaction formula: SiCl₄ + 2H₂O → SiO₂↓ + 4HCl↑; reacts violently with alkaline substances such as strong bases and amines; may react with active metals (e.g., aluminum, magnesium) to form metal chlorides and silicides.

• Solubility: Easily soluble in organic solvents such as benzene, toluene, and carbon tetrachloride; insoluble in water (violent reaction with water).

3. Hazardous Characteristics and Safety Protection

• Hazardous Characteristics: Highly corrosive; liquid or hydrochloric acid mist generated by hydrolysis can corrode the skin, eyes, and respiratory tract mucosa, causing severe burns. Inhalation of high-concentration hydrochloric acid mist can cause coughing, chest tightness, pulmonary edema, etc. Heat generated by hydrolysis may increase pressure inside the container, leading to expanded leakage. Although non-flammable itself, contact with combustibles may cause fires due to corrosion.

• Safety Protection Measures:

• Personal Protection: Wear a positive pressure air respirator (against hydrochloric acid mist), chemical splash full-face mask, fluororubber gloves, acid-resistant chemical protective clothing, and chemical-resistant boots.

• Work Environment: Ensure good ventilation, install an acidic gas detection and alarm device (to detect HCl concentration); equip on-site with an emergency shower, eye washer (within ≤15 meters from the operation point), and neutralizing emergency materials (sodium carbonate powder, calcium hydroxide solution); strictly prohibit co-storage or contact with strong bases, active metals, and combustibles.

• Emergency Treatment: For skin contact, immediately rinse with plenty of flowing water for 15 minutes, then rinse with 5% sodium carbonate solution and seek medical attention; for eye contact, rinse with plenty of water for 15 minutes and seek medical attention; for leakage, cover and absorb with sand or inert adsorbent materials, then neutralize with alkaline solution, collect and dispose of as hazardous waste; strictly prohibit direct flushing of the leak with water (to avoid violent hydrolysis).

4. Storage and Transportation

• Storage: Store in corrosion-resistant containers (316L stainless steel, polytetrafluoroethylene, or glass containers) in a dedicated cool and dry warehouse with a temperature not exceeding 30℃; keep away from strong bases, active metals, combustibles, and water; ensure containers are tightly sealed to prevent volatilization and moisture absorption; the warehouse floor should be anti-corrosion treated and equipped with leakage collection devices.

• Transportation: Use special corrosion-resistant tank-type transport vehicles equipped with leakage prevention devices and marked with "Corrosive Substance" warning signs; avoid exposure to sunlight, rain, and severe vibration during transportation; strictly prohibit mixed transportation with strong bases, active metals, and combustibles; drivers and escorts must have professional qualifications and carry a Safety Data Sheet (SDS).

IV. General Precautions

• The production, operation, storage, and transportation of the three substances must comply with the "Regulations on the Safety Administration of Hazardous Chemicals" and relevant international regulations (e.g., IMDG Code, OSHA). Corresponding qualifications must be obtained, and operators must pass professional training before taking up their posts.

• Strictly follow safe operating procedures during operation; strictly prohibit process simplification or illegal operations; regularly inspect and maintain the work environment, equipment, and protective equipment to ensure they are in good working condition.

• Waste disposal must comply with hazardous waste management regulations; hand over to qualified professional institutions for harmless treatment; strictly prohibit random discharge or disposal to avoid environmental pollution.

• If the three substances exist in the same operation area, strictly divide storage and operation zones to avoid dangerous reactions caused by mutual contact; formulate a special emergency plan and conduct regular emergency drills.

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