Views: 2025 Author: Keystone Vessel (Wuhan) Publish Time: 2024-05-06 Origin: Keystone Vessel (Wuhan)
Delivery 60PCS 40L Electronics Grade DCS Dichlorosilane (SiH2Cl2) UN 2189 Stainless Steel Cylinder For Semiconductors Industry
Electronics Grade DCS Dichlorosilane (SiH2Cl2) Steel Cylinder KSC40L Cylinder
Keystone Vessel Model ：KSC40L
Volume：40L
Operating Temperature：-40~65℃
Certification Medium：DCS、WF6、HF、STC……
Optional Certificate：UN
Work Pressure：2.0MPa
Product Description：Standard Operating Procedure is ASME Ⅷ Div.1 ISO 18172-1 IMDGCODE TSG23 GB/T 32566
Safety Use and Management Specifications for Dichlorosilane Steel Cylinders
Dichlorosilane (SiH₂Cl₂) is a hazardous chemical with flammable, toxic, and corrosive properties. Its core storage and transportation carrier is a special steel cylinder. To ensure safety throughout the entire life cycle, dichlorosilane steel cylinders must strictly comply with the following specifications, covering key links such as cylinder selection, storage and custody, transportation operations, use and maintenance, and emergency disposal.
I.Keystone Vessel Cylinder Selection and Material Requirements
• Material Standard: High-quality corrosion-resistant and low-adsorption materials shall be selected. Priority shall be given to 316L stainless steel or Hastelloy alloy steel cylinders. The inner wall shall be polished (roughness Ra ≤ 0.8μm) to avoid impurity adsorption and cylinder corrosion, ensuring that the gas purity is not contaminated.
• Sealing Performance: Equipped with a special corrosion-resistant and anti-static diaphragm valve. The valve material shall match the cylinder body (such as 316L stainless steel + fluororubber seals) to ensure tight sealing and no leakage risk; ordinary valves or accessories with poor sealing performance are prohibited.
• Specification and Pressure Level: Common specifications are 47L and 50L high-pressure steel cylinders. The design pressure is not less than 10MPa, and the working pressure shall be adapted to the storage requirements of dichlorosilane (the pressure range corresponding to the saturated vapor pressure at room temperature); the steel cylinder shall comply with the requirements of GB 5099 "Seamless Steel Gas Cylinders" or international standards (such as ISO 9809).
• Qualification Certification: Steel cylinders must be manufactured by institutions with corresponding qualifications, accompanied by product qualification certificates and supervision and inspection certificates, and must be regularly inspected (inspection cycle not exceeding 5 years) before being put into use; overdue, scrapped, or damaged steel cylinders are strictly prohibited.
II. Safety Specifications for Cylinder Storage
1. Storage Environment Requirements
• Store in a dedicated dangerous goods warehouse that is dry, closed, and well-ventilated. The warehouse shall adopt an explosion-proof design (explosion-proof grade not lower than Ex d IIBT4), equipped with an inert gas (nitrogen) purging system and a leakage emergency treatment device.
• The warehouse temperature is strictly controlled at -20℃ ~ 20℃ to avoid pressure increase in the cylinder caused by high temperature; the relative humidity is ≤ 30% to prevent moisture in the air from entering the cylinder and causing hydrolysis reaction of dichlorosilane.
• Electrical switches, sockets, and other equipment that may generate electric sparks are strictly prohibited in the warehouse; lighting shall adopt explosion-proof emergency lighting; a sufficient number of dry powder fire extinguishers (sodium bicarbonate dry powder) and emergency neutralization materials (dry sodium carbonate powder, calcium hydroxide powder) shall be equipped.
2. Storage and Placement Requirements
• Steel cylinders shall be placed upright and firmly fixed with special brackets or chains to prevent tipping and collision; soft pads shall be placed at the contact points between the cylinder body and the brackets to avoid cylinder wear.
• Strictly store separately from oxidants, alkaline substances, active metals (such as aluminum, magnesium), etc., with a distance of not less than 10 meters, and obvious isolation signs shall be set; mixed storage with food, medicines, etc. is prohibited.
• The cylinder valves shall face the same direction (away from passages and operation areas) to facilitate closing the valves in emergency situations; clear warning signs of "Toxic Gas", "Flammable Gas", and "Corrosive Substance" shall be set in the storage area.
3. Routine Inspection During Storage
• Check the cylinder pressure (through the cylinder valve pressure gauge) daily. If the pressure is abnormally high or low, immediately investigate the cause of the leak and take emergency measures.
• Regularly check the sealing of the cylinder body, valve, and interface parts. The soap water application method can be used to detect leaks (open flame detection is prohibited); if a leak is found, immediately transfer it to a safe area for treatment.
• Establish a storage account, recording information such as cylinder number, warehousing time, purity index, and inspection cycle to ensure full traceability.
III. Safety Specifications for Cylinder Transportation
1. Transportation Qualifications and Vehicle Requirements
• Transport vehicles must have dangerous chemicals transportation qualifications (tank-type special vehicles), equipped with explosion-proof and anti-static facilities, installed with satellite positioning systems, and undergone corrosion-resistant transformation.
• Drivers and escorts must hold dangerous chemicals transportation qualification certificates and be familiar with the dangerous characteristics of dichlorosilane and the emergency treatment methods for steel cylinders.
2. Operational Requirements During Transportation
• Before transporting the steel cylinder, recheck the sealing of the valve to ensure that the cylinder body is firmly fixed and placed upright with a special explosion-proof bracket to avoid severe vibration and collision during transportation.
• The transportation temperature is controlled at -20℃ ~ 30℃. Sunshade and cooling measures shall be taken in summer, and anti-freezing measures shall be taken in winter; exposure to sunlight and rain is strictly prohibited.
• The vehicle shall be affixed with triple warning signs of "Toxic Gas", "Flammable Gas", and "Corrosive Substance", accompanied by a Safety Data Sheet (SDS) and dangerous goods transportation documents, clearly indicating the number of cylinders, serial numbers, goods information, etc.
3. Transportation Taboos
• Mixed transportation with oxidants, alkaline substances, active metals, food, etc. is strictly prohibited; the transportation route shall avoid densely populated areas, schools, hospitals, residential areas, etc., and stopping in the above areas is strictly prohibited.
• Smoking and using open flames are strictly prohibited during transportation; the vehicle shall be equipped with dry powder fire extinguishers, emergency neutralization materials, and first-aid supplies.
• Cross-border or international transportation must comply with relevant rules such as the IMDG Code (International Maritime Dangerous Goods Code) and IATA (International Air Transport Association), and transportation approval procedures shall be completed in advance.
IV. Safety Operation Specifications for Cylinder Use
1. Preparation Before Use
• The use area shall be a closed glove box with negative pressure ventilation or a closed workshop protected by inert gas (nitrogen/argon), equipped with an efficient forced ventilation system and a dichlorosilane gas detection and alarm device (detecting both toxic and flammable concentrations).
• Operators shall wear full sets of personal protective equipment: positive pressure air respirator (full-face mask type), fluororubber chemical protective clothing, fluororubber gloves, and chemical-resistant boots; wearing chemical fiber clothing is strictly prohibited (to avoid generating static electricity).
• Check that the cylinder has no external damage and the valve is intact, confirm that the used equipment (pipes, interfaces, pressure reducing valves) matches the cylinder, and that it has been purged and replaced with inert gas (to avoid contact between air in the pipes and dichlorosilane).
2. Operation During Use
• When opening the cylinder valve, operate slowly to avoid static electricity generated by rapid gas release; first open the valve slightly to purge impurities at the interface, then connect the used equipment, and recheck for leaks after connection.
• Strictly control the gas flow rate during use to avoid overpressure use; real-time monitor the gas concentration in the use area. If the concentration exceeds the standard (reaches the alarm threshold), immediately stop use, close the cylinder valve, investigate the leak, and ventilate and replace.
• Knocking and colliding with the cylinder are prohibited, and hot working operations such as electric welding and gas cutting on the cylinder are strictly prohibited; the cylinder shall not be inverted or placed horizontally during use.
3. Post-Use Treatment
• After use, first close the main valve of the cylinder, then purge the residual dichlorosilane in the pipeline with inert gas through the purging system of the used equipment to prevent blockage or leakage caused by hydrolysis of the residual gas in the pipeline.
• Disassemble the connection interface between the cylinder and the equipment, seal the valve outlet with a special plug, and keep a use record (use time, dosage, residual pressure, etc.).
• Transfer the cylinder to a dedicated storage area for storage, and do not place it randomly at the use site.
V. Cylinder Leakage and Emergency Disposal
1. Leakage Emergency Response
• If a cylinder leak is found, immediately activate the emergency response, evacuate all personnel in the leak-contaminated area to a safe area upwind, set up a warning zone (warning radius of at least 50 meters), and strictly prohibit irrelevant personnel from entering.
• Emergency personnel must wear full sets of protective equipment (positive pressure air respirator, fluororubber chemical protective clothing, anti-static gloves, etc.) and carry explosion-proof tools.
2. Leakage Control and Treatment
• Prioritize closing the leak source: if the valve is not damaged, immediately close the main valve of the cylinder slowly; if the valve is damaged and cannot be closed, use special plugging tools for plugging, and the entire process shall be operated under the protection of inert gas.
• Small Leakage: Cover and absorb with dry sodium carbonate powder or calcium hydroxide powder. The absorbed waste shall be disposed of as hazardous waste, and flushing with water is strictly prohibited (to avoid hydrolysis of dichlorosilane generating a large amount of hydrochloric acid and hydrogen).
• Large Leakage: Build a corrosion-resistant dike to contain the leaked material, and use special explosion-proof pumping equipment to introduce the leaked gas into an alkaline solution absorption tower for neutralization treatment to prevent gas diffusion.
3. Fire Emergency Disposal
• If a fire is caused by leakage, immediately cut off the leak source (do not blindly extinguish the fire if it cannot be cut off, and control the fire to prevent spread), use dry powder fire extinguishers (sodium bicarbonate dry powder) and carbon dioxide fire extinguishers to put out the fire, and water and foam fire extinguishers are strictly prohibited.
• Fire extinguishers shall operate upwind and wear full sets of protective equipment; after extinguishing the fire, neutralize the scene, and clean the scene only after the gas concentration is detected to be up to standard.
VI. Cylinder Scrapping and Recycling
• When a steel cylinder reaches its service life, fails inspection, or has severe damage (such as cylinder deformation, corrosion perforation, or irreparable valve), it shall be scrapped and continued use is strictly prohibited.
• The residual dichlorosilane in the scrapped steel cylinder shall first be purged with inert gas by professional personnel, then absorbed and treated with alkaline solution until it meets the standard, and then handed over to a professional institution with hazardous waste recycling qualifications for disassembly, recycling, or destruction.
• Scrapped steel cylinders shall be affixed with a "Scrapped" label, and a scrap account shall be established, recording information such as the reason for scrapping, processing time, and processing institution to ensure full traceability.
VII. Supplementary Provisions
• Matters not covered in these specifications shall comply with the requirements of the "Regulations on the Safety Administration of Hazardous Chemicals", "Gas Cylinder Safety Supervision Regulations", and relevant international laws and regulations.
Personnel involved in the use and management of steel cylinders shall receive professional training regularly, be familiar with these specifications and emergency disposal procedures, and can only take up their posts after passing the assessment.
Keystone Vessel Manufacturing Co., Ltd
Keystone VesselSpecializing - Industrial Gas Cylinders| ISO Tank| Pressure Vessel| UN Portable Tanks
