Delivery 196 PCS 316L Stainless Steel Electronical Grade High-purity DCS、UN2189、UN2196 Specialty Gas Cylinders

 Delivery 196 PCS  316L Stainless Steel Electronical Grade High-purity  DCS、UN2189、UN2196 Specialty Gas Cylinders

High-purity Dichlorosilane Gas Cylinders Delivery

Electronic-grade High-purity Cylinders 

KSC10L Specialty Gas Cylinders

Product Model ：KSC10L

Volume：10L

Operating Temperature：-40~65℃

Certification Medium：DCS、UN2189、UN2196……Electronic Specialty Gases

Optional Certificate：TS、UN、TPED、DOT

Work Pressure：2.2MPa

Helium Leak Detection Rate：≤1X10⁻⁹ pa.m³/s

Polishing Grade：EP,Ra0.07-0.25um

KSC40L Specialty Gas Cylinders

Product Model ：KSC40L

Volume：40L

Operating Temperature：-40~65℃

Certification Medium：DCS、WF6、HF、STC……Electronic Specialty Gases

Optional Certificate：UN

Work Pressure：2.0MPa

Product Description：Standard Operating Procedure is ASME Ⅷ Div.1 ISO 18172-1 IMDGCODE TSG23 GB/T 32566

Safety Use and Management Specifications for Stainless Steel Gas Cylinders of Electronic Specialty Gases

Keystone Vessel Electronic specialty gases are core raw materials in high-tech fields such as semiconductors, photovoltaics, and microelectronics. The core carrier for their storage and transportation is dedicated stainless steel gas cylinders. Such cylinders must meet stringent requirements of high purity, low adsorption, corrosion resistance, and zero leakage to ensure gas purity and operational safety. The following is a full-lifecycle safety management specification covering cylinder selection, preparation, storage, transportation, use, and maintenance.

I. Keystone Vessel Cylinder Selection and Material Standards

1. Core Material Requirements

• Prioritize 316L stainless steel or Hastelloy C-276 with a carbon content ≤ 0.03% and sulfur/phosphorus impurity content ≤ 0.015% to ensure corrosion resistance and minimal metal ion leaching.

• The inner wall must undergo electropolishing + passivation treatment, with a roughness Ra ≤ 0.07μm, to reduce gas adsorption and impurity residue, meeting the cleanliness requirements of electronic specialty gases (especially those with a purity of 5N and above).

• Ordinary stainless steel (e.g., 304 stainless steel) is prohibited to avoid cylinder corrosion and gas contamination caused by insufficient corrosion resistance.

2. Structural and Sealing Design

• Keystone Vessel Manufactured using a seamless forming process, the cylinder body has no welds and uniform wall thickness (adapted to design pressure, usually ≥ 3mm) to ensure structural strength and airtightness.

• Equipped with corrosion-resistant diaphragm valves or bellows valves, with seals made of PFA (perfluoroalkoxy resin), fluororubber, or metal. The leak rate must be ≤ 1×10⁻⁹ Pa·m³/s (tested by helium leak detection).

• Valve interfaces adopt international standards (e.g., CGA, QF, DISS interfaces) to prevent leakage caused by mismatching, and the inner walls of interfaces must be polished synchronously.

3. Specifications and Pressure Ratings

• Common specifications: 47L, 50L, 80L high-pressure cylinders with a water volume error ≤ ±1%. The Maximum Allowable Working Pressure (MAWP) is typically 10MPa, 15MPa, or 20MPa, adapted to the saturated vapor pressure requirements of different electronic specialty gases.

• The design pressure is ≥ 1.5 times the maximum working pressure, and the burst pressure is ≥ 3 times the maximum working pressure, complying with GB 5099 Seamless Steel Gas Cylinders, ISO 9809, or ASTM E1993 international standards.

4. Qualification and Certification Requirements

• Cylinders must be produced by enterprises with special equipment manufacturing qualifications, accompanied by product qualification certificates, material analysis reports, inner wall cleanliness test reports, and third-party supervision and inspection certificates.

• They must pass industry certifications such as ISO 11118 (Refillable Gas Cylinders Standard) and SEMI F19 (Semiconductor Gas Container Safety Standard) to ensure suitability for electronic specialty gas applications.

II. Keystone Vessel Cylinder Preparation and Cleanliness Control

1. Inner Wall Treatment Process

• After electropolishing, perform ultra-high-purity cleaning: ultrasonic cleaning with ultrapure water (resistivity ≥ 18.2 MΩ·cm) + electronic-grade cleaning agent to remove grease, metal particles, and oxides.

• Conduct vacuum drying after cleaning at a temperature of 120–150℃ and a vacuum level ≤ 1Pa, ensuring no moisture (≤ 5ppb) and no residual contaminants (particle count of particles ≥ 0.1μm ≤ 10 particles per cylinder) inside the cylinder.

• Finally, perform inert gas replacement (using nitrogen or argon with a purity ≥ 99.999%), with the oxygen content inside the cylinder ≤ 0.1% to avoid reactions with electronic specialty gases.

2. Factory Inspection Requirements

• Airtightness test: Use helium as the test medium at a pressure of 1.1 times the maximum working pressure, holding for 30 minutes without leakage.

• Hydrostatic test: Random sampling of each batch of cylinders for hydrostatic testing at a pressure of 1.5 times the design pressure; no permanent deformation or leakage is considered qualified.

• Cleanliness test: Detect with particle counters, moisture analyzers, and metal ion detectors to ensure compliance with cleanliness indicators for electronic specialty gas storage.

III. Safety Specifications for Cylinder Storage

1. Storage Environment Requirements

• The dedicated warehouse must meet the following conditions: dry (relative humidity ≤ 30%), cool (temperature -20℃–25℃), and well-ventilated (negative pressure ventilation with an air exchange rate ≥ 10 times per hour) to avoid pressure increase inside the cylinder due to high temperatures.

• The warehouse’s explosion-proof grade shall not be lower than Ex d IIBT4, equipped with gas detection and alarm devices (adapted to the type of specialty gas, e.g., toxic, flammable, corrosive gas detectors), an inert gas purging system, and an emergency absorption device.

• The floor shall be made of anti-static and corrosion-resistant materials (e.g., PTFE flooring), with a leakage collection tank to prevent the diffusion of leaked gas or floor corrosion.

2. Storage and Placement Requirements

• Cylinders shall be placed upright and firmly fixed with dedicated stainless steel brackets or chains. Soft pads shall be placed at the contact points between the cylinder body and brackets to prevent collision and wear. Valve openings shall face the same direction, away from passages and operation areas, facilitating emergency valve closing.

• Store by gas properties in separate zones: flammable gases (e.g., hydrogen, silane), toxic gases (e.g., arsine, phosphine), corrosive gases (e.g., hydrogen chloride, hydrogen fluoride), and inert gases (e.g., nitrogen, argon) shall be stored separately with a spacing of not less than 10 meters, and clear zoning signs shall be set.

• Cylinders of different purities and batches shall be placed separately. Establish a storage account to record information such as cylinder number, gas name, purity, warehousing time, residual pressure, and inspection cycle to ensure full traceability.

3. Routine Inspection Requirements During Storage

• Daily inspection: Check cylinder pressure (normal pressure range in accordance with manufacturer specifications), valve sealing condition, and ensure no abnormal leakage; verify that the warehouse temperature, humidity, and gas detection alarm devices are functioning properly.

• Weekly inspection: Use a helium leak detector or soapy water to check for leaks at valves, interfaces, and other parts (soapy water is strictly prohibited for toxic gases; use dedicated leak detectors).

• Monthly maintenance: Inspect the effectiveness of the warehouse ventilation system, emergency devices, and protective equipment to ensure normal operation.

IV. Safety Specifications for Cylinder Transportation

1. Transportation Qualifications and Vehicle Requirements

• Transport vehicles must have dangerous chemicals transportation qualifications, equipped with explosion-proof and anti-static facilities (grounding chains, anti-static mats), temperature control systems (refrigeration/heating functions), and satellite positioning systems.

• The vehicle cargo compartment must undergo corrosion-resistant and anti-static treatment, equipped with dry powder fire extinguishers, emergency neutralization materials (e.g., sodium carbonate powder, calcium hydroxide solution), and first-aid supplies.

• Drivers and escorts must hold dangerous chemicals transportation qualification certificates, be familiar with the hazardous characteristics of electronic specialty gases and emergency disposal procedures, and carry the Safety Data Sheet (SDS) with them.

2. Operational Requirements During Transportation

• Pre-transport inspection: Confirm that cylinder valves are sealed properly and the cylinder body is undamaged; fix with dedicated stainless steel brackets and place upright to avoid severe vibration, collision, or inversion.

• Temperature control: Adjust transportation temperature according to gas characteristics (e.g., control liquefiable gases at -10℃–20℃); take sunshade and heat insulation measures in summer and anti-freezing protection in winter. Exposure to sunlight and rain is strictly prohibited.

• Marking and accompanying documents: The vehicle shall be affixed with hazard warning signs corresponding to the gas (e.g., "Toxic Gas", "Flammable Gas"), accompanied by dangerous goods transportation documents, gas purity reports, and SDS.

3. Transportation Taboos

• Mixed transportation is strictly prohibited: Flammable gases shall be separated from oxidizing gases, toxic gases from food, and corrosive gases from general cargo by a spacing of not less than 5 meters.

• The transportation route shall avoid densely populated areas, schools, hospitals, water sources, etc., and stopping in the above areas is strictly prohibited; smoking and using open flames during transportation are strictly prohibited.

• International transportation must comply with the requirements of the IMDG Code (International Maritime Dangerous Goods Code) and IATA (International Air Transport Association). Complete transportation approval procedures in advance to ensure that cylinder packaging and marking meet international standards.

V. Safe Operation Specifications for Cylinder Use

1. Preparation Before Use

• Operation area: Must be a glove box protected by inert gas or a negative pressure ventilation workshop, equipped with an efficient forced ventilation system, gas detection and alarm devices, and an emergency shower/eyewash station (≤ 10 meters from the operation point).

• Personal protection: Wear corresponding protective equipment according to gas characteristics, such as positive pressure air respirators (for toxic/corrosive gases), fluororubber chemical protective clothing (for corrosive gases), and anti-static work clothes (for flammable gases). Wearing chemical fiber clothing is strictly prohibited.

• Equipment inspection: Confirm that the equipment used (pipes, pressure reducing valves, joints) is made of 316L stainless steel or PFA, purged and replaced with inert gas (residual oxygen content ≤ 0.1%), and the interface seals are intact.

2. Operation During Use

• Valve opening: Operate slowly, first purge interface impurities at a small opening for 30 seconds, then connect the equipment; perform helium leak detection after connection and confirm no leakage before ventilating.

• Flow control: Strictly adjust gas flow rate according to process requirements to avoid overpressure and over-flow use; real-time monitor the gas concentration in the operation area. If the concentration exceeds the standard, immediately close the valve and ventilate until it meets the standard.

• Prohibited behaviors: Knocking and colliding with the cylinder are prohibited; hot working such as electric welding and gas cutting on the cylinder is strictly prohibited. The cylinder shall remain upright during use and shall not be placed horizontally or inverted.

3. Post-Use Treatment

• Valve closing: First close the main valve of the cylinder, then purge residual gas in the pipeline with inert gas to prevent gas retention or hydrolysis.

• Sealing and storage: After disassembling the interface, seal the valve outlet with a dedicated plug, record information such as use time, dosage, and residual pressure, and transfer to a dedicated storage area.

VI. Cylinder Maintenance and Periodic Inspection

1. Daily Maintenance Requirements

• Keep the cylinder surface clean, avoid contamination with oil and corrosive liquids, and regularly wipe the cylinder body and valves with anhydrous ethanol.

• Valve maintenance: Regularly check the flexibility of valve opening and closing. If jamming or leakage occurs, it must be repaired or replaced by professional personnel; disassembly by non-professionals is prohibited.

• Idle management: For cylinders idle for more than 3 months, fill with 0.2–0.5MPa inert gas for protection, and regularly check the pressure to prevent air ingress.

2. Periodic Inspection Specifications

• Periodic inspection cycle: In accordance with national standards and manufacturer requirements, generally 5 years; cylinders exceeding the service life (usually 15 years) or failing inspection shall be scrapped immediately.

• Inspection items: Include hydrostatic test, airtightness test, inner wall cleanliness test, wall thickness measurement, valve calibration, etc. Only after passing inspection and affixing the inspection mark can the cylinder be reused.

• Scrap disposal: Scrapped cylinders must be purged with inert gas, crushed, or cut by professional institutions, affixed with a "Scrapped" label, and a scrap account shall be established. Reuse is strictly prohibited.

VII. Supplementary Provisions

1. This specification applies to the management of stainless steel cylinders for various electronic specialty gases such as electronic-grade hydrides, fluorides, chlorides, and inert gases. Matters not covered herein shall comply with the Regulations on the Safety Administration of Hazardous Chemicals, Gas Cylinder Safety Supervision Regulations, and relevant SEMI industry standards.

2. Operators must receive professional training, be familiar with the characteristics of electronic specialty gases and cylinder operation procedures, and can only take up their posts after passing the assessment. Conduct regular emergency drills to improve the disposal capacity of emergencies such as leakage and fire.

Keystone Vessel Manufacturing Co., Ltd

Keystone VesselSpecializing - Industrial Gas Cylinders| ISO Tank| Pressure Vessel| UN Portable Tanks